Do you know how much photomask production tools cost?
For example, electron-beam reticle writing machines hover around the $10-$20 million range. Photomask inspection is the most expensive part of mask production. A full-blown mask inspection system can costs of around $30 million - each.
And in total, the capital cost for a single, leading-edge mask line is projected to be about $60 million for the 90-nm node alone. That is expected to jump from $68-$70 million for a single 65-nm mask line to about $80 million for a 45-nm reticle line.
Full article: http://eet.com/news/design/showArticle.jhtml?articleID=181503925
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